Senior Process Engineer Lithography

About this position

At the forefront of Europe’s photonics innovation, TNO is building a state-of-the-art pilot line for Indium Phosphide (InP) photonic chips at the High Tech Campus in Eindhoven. As part of the EU-funded PIXEurope program, this pilot line will enable the transition from groundbreaking research to large-scale industrial manufacturing, making advanced photonic technologies faster, more reliable, and widely accessible.

To help realize this ambitious step, we are looking for a Senior Process Engineer Lithography. In this role, you will develop, optimize, and industrialize DUV lithography processes that are critical for wafer-scale photonic chip production. With your deep understanding of lithography systems, resist processes, and pattern transfer, you will ensure that innovative research is translated into stable, scalable, and high-yield manufacturing processes.
What will be your role?  As Senior Process Engineer Lithography, you are responsible for process development, optimization, and industrialization in a high-tech cleanroom environment. You focus on DUV lithography processes for 6-inch InP wafers, ensuring excellent critical dimension control, overlay performance, and process robustness. By working closely with R&D, equipment engineers, and QA teams, you enable stable production, continuous yield improvement, and the successful introduction of new lithography technologies into the pilot line.

Key responsibilities include:

Developing, qualifying, and optimizing DUV and i-line lithography processes for 6-inch InP wafer manufacturing.
Setting up and scaling new lithography processes to industrial-level production, ensuring robustness and reproducibility.
Analyzing process data, performing root cause analyses, and applying statistical methods such as SPC, FMEA, and DoE.
Ensuring process stability, CD uniformity, overlay control, and high yield across the lithography module.
Supporting operators and technicians with process-related issues to ensure smooth continuation of wafer manufacturing.
Troubleshooting process disruptions and implementing corrective and preventive actions.
Leading process improvement projects and supporting the introduction of new lithography tools and technologies.
Collaborating closely in cross-functional teams (R&D, Equipment, QA) and reporting progress to management.
Creating and maintaining process documentation, work instructions, and best practices.
Mentoring junior engineers, acting as (acting) cluster lead when needed, and representing process engineering in multidisciplinary forums.
What we expect from you   A PhD, MSc, or BSc degree in physics, materials science, electrical engineering, chemistry, or a related field.
10+ years of experience in semiconductor process engineering, preferably in an industrial wafer fab environment.
In-depth knowledge of DUV lithography systems and processes.
Proven experience in setting up and industrializing new lithography processes.
Strong background in process development, optimization, troubleshooting, and yield improvement.
Familiarity with statistical process control and characterization methods (SPC, FMEA, DoE).
Demonstrated leadership experience, for example as cluster lead or acting cluster lead.
A mentoring and coaching mindset, with the ability to support junior colleagues and guide complex projects.
A strategic and analytical approach, combined with strong communication and stakeholder management skills.
What you'll get in return  Challenging and varied work with a real impact. And plenty of opportunities as, at TNO, you are in charge of shaping your career. We offer a gross monthly salary between (based on your knowledge and experience), 8% holiday pay, a 13th month bonus of 8.33% and a flex budget (5.58% + € 180). In addition, you will be given every opportunity to develop yourself.
TNO offers optional employee benefits, enabling you to tailor your benefits package to match your personal situation.
You may also expect:
An extremely professional, innovative working environment where colleagues are leading experts in their field.
The opportunity to attend courses, workshops and conferences, and to receive training and…