Nanocalorimetry In-Situ Plasma Monitoring

The Material Measurement Laboratory of the National Institute of Standards and Technology (NIST) is seeking qualified persons (U.S. citizens preferred) to join a multi-disciplinary team of scientists working to advance the current state-of-the-art in nanocalorimetry-based measurements for monitoring of semiconductor manufacturing processes. This individual will work closely with the leaders of this multi-effort project but will personally be responsible for incorporating these novel sensors into a custom plasma chamber and determining their utility for in-situ characterization of plasma-based etching and deposition processes.

• Design and assemble a custom plasma reactor that integrates NIST-produced nanocalorimetry sensors as well as other common plasma diagnostic tools.
• Perform experiments using a variety of plasma types and conditions relevant for semiconductor manufacturing processes, utilizing nanocalorimetry along with other plasma diagnostic techniques for in-situ monitoring.
• Data interpretation to understand the parameters during plasma processes and assess the feasibility of using nanocalorimetry as a process monitoring technique.
• Publish results in peer reviewed scientific journals and present results at scientific conferences.

• Ph.D. in materials science, physics, chemistry, chemical engineering, or related field.
• Hands-on expertise in the design and assembly of custom plasma reactors, as well as experience using plasma diagnostic techniques such as Langmuir and optical probes.
• Experience with calorimetry-based measurements of temperature and/or thermal properties of materials.
• Understanding of measurements of radical/ionic fluxes and energy distributions at the substrate level, as well as deep knowledge of plasma-surface interactions.
• Strong written and oral communication skills; ability to work independently and as part of a team.

This opportunity is to be an associate researcher in the Materials Measurement Science Division for a term of 1 year, with options to renew. Associate researchers are NOT Federal Employees, but they work aside NIST researchers and with NIST’s world-class instrumentation. Relocation expenses will not be provided. U.S. citizens hired into associate positions may have the opportunity to seek longer term Federal Employment.

An Associate at NIST is not a federal employee but collaborates with NIST on research projects of mutual interest and does not work exclusively on NIST mission-related activities. If you have any questions, please contact the International and Academic Affairs Office at IAAO .