Senior Mechanical, Vacuum and Thermal Engineer

Design the chamber, heater and cooled faceplate of a 300 mm growth tool

Nano Galaxy is Phanta Field's growth tool. It uses pulsed-plasma MOCVD (PP-MOCVD) and is designed to grow 2D semiconductors such as MoS2 on 300 mm wafers below about 450 °C, so that new layers can be grown on top of chips that are already finished. We designed and ran an 8-inch research reactor with a university partner, and we have designed the 300 mm system.

Measured results so far include MoS2 transistors and a capacitor-less 2T0C memory cell that holds data past 1,000 seconds. Prof. Chenming Hu, co-inventor of the FinFET, was our first investor and advises us.

You will own the chamber hardware: faceplate, heater and susceptor, lid, liner and exhaust. Two questions drive the design freeze. Can an actively cooled faceplate keep the precursor from breaking down before it reaches the wafer? Can the heater hold the wafer within a fraction of a degree? You answer both with tests, then turn the design into kitted modules our contract manufacturers build.

You report to the CEO.

FACEPLATE Design an actively cooled faceplate and prove it with a soak test.

HEATER Tune the six-zone heater and susceptor toward ±0.5 °C across the wafer.

CHAMBER Detail the lid, liner and dual exhaust.

KITS Make kitted-module drawings contract manufacturers can build to, and integrate the bought transfer hub and EFEM.

LAYOUT Settle the tool footprint and service access with the controls and gas engineers.

• 8+ years designing HV or UHV chambers and heaters for semiconductor equipment
• Thermal analysis and CFD of heated susceptors and gas flow
• DFM for weldments and machined parts, and GD&T
• Released drawings under configuration control in Solid Works or a similar CAD tool
• SEMI S2 and S8 mechanical requirements

• Shower head or faceplate cooling
• SiC and quartz parts
• Wafer handling and EFEM integration
• MOCVD or CVD chambers

The chamber is where the tool works or fails, and the design is still open enough for your tests to decide it. You see your drawings become hardware at the contract manufacturers we choose, and you work next to the process engineer who runs it.

Phanta Field is an equal opportunity employer. This role involves technology subject to U.S. export controls. Employment may depend on obtaining any required U.S. government authorization.