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System Particle Control Hardware Engineer​/Scientist – Semiconductor Equipment

Job in Beverly, Essex County, Massachusetts, 01915, USA
Listing for: Axcelis Technologies, Inc.
Full Time position
Listed on 2026-09-20
Job specializations:
  • Engineering
    Mechanical Engineer, Process Engineer, Quality Engineering, Electronics Engineer
Salary/Wage Range or Industry Benchmark: 131000 - 196000 USD Yearly USD 131000.00 196000.00 YEAR
Job Description & How to Apply Below

JOB DESCRIPTION Our people make all the difference in our success. Axcelis Technologies develops innovative capital equipment for the semiconductor industry. Our Platform Controls team develops control architectures, industrial automation solutions, and advanced control algorithms that enable reliable, high-performance operation of complex subsystems.

About the Role

This exciting hands-on role for Particle Control Hardware Engineer/Scientist reporting into Technology Development organization is responsible for designing and developing hardware solutions to minimize particle and contamination on Axcelis implantation systems. This role focuses on designing, testing and qualifying components within Axcelis tools by applying mechanical engineering, surface engineering, material interaction chemistry and particle transport physics. The role requires extensively cross-functional collaboration with process engineering, design engineering, equipment engineering and field support teams to identify particle and metal contamination sources, implement corrective actions, and improve tool performance in lab and at customer sites across the world.

Key Responsibilities
  • As the lead particle control hardware engineer/scientist
  • Conduct root cause investigations for particle-related yield excursions and defectivity issues with hands on testing and analysis using advanced metrology systems such as particle counters, SEM/EDX, VPD ICP-MS, optical inspection.
  • Design precision mechanical components for the system specifically in key modules affecting particle performance.
  • Develop materials, coatings, seals, and surface finishes suitable for ultra-clean applications.
  • Perform mechanical analysis to reduce particle generation from wear, friction, vibration, and system interfaces.
  • Utilize PLM, CAD, and FEA tools.
  • Specific knowledge of Windchill, Creo and Ansys.
  • Interface with customers and suppliers regarding contamination specifications and corrective actions.
  • Support audits, customer inquiries, and technical problem-solving activities.
  • Travel internationally as required to support customer upgrades and testing (10-25%).
Requirements
  • Master or PhD in Mechanical Engineering, Aerospace Engineering, Materials Engineering, Manufacturing Engineering or equivalent areas.
  • 3-10 years of hardware development experience in semiconductor manufacturing, semiconductor equipment, vacuum systems, or contamination-sensitive industries.
  • Demonstrated hands on working experience operating sophisticated systems similar to semiconductor equipment.
  • Working level understanding of contamination control and particle generation mechanisms.
  • Experience with:
    • Cleanroom operations (ISO Class 1-5 preferred)
    • Vacuum system design
    • Precision mechanical assemblies
    • Wafer handling systems
    • Root cause analysis methodologies
    • Statistical process control (SPC)
    • Proficiency in CAD software (CREO or similar) and engineering documentation practices.
    • Working experience with statistical analysis techniques and software.
    • Experience working with suppliers on technology development.
    • Able to work in a lab environment and assist with hardware installations.
    • Able to work collaboratively in a fast paced environment.
    • Strong communication and presentation skills.
Preferred Knowledge
  • Knowledgeable with graphite, graphite surface treatments, semiconductor chamber shield design.
  • Knowledgeable in typical particle types in semiconductor systems and mitigation methods.
EQUAL OPPORTUNITY STATEMENT

It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law. Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.

U.S.

BASE SALARY RANGE

$ - $ This base salary range reflects the typical compensation for this role across U.S. locations. Our salary ranges are determined by role and level; individual pay is determined based on multiple factors, including job-related skills, experience, relevant education or training, work location, and internal equity. The range provides the opportunity for growth and progression as you develop within the role.

Base pay is one part of our U.S. total…

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