Process Engineer: Electromechanical Processing

ASMPT-NEXX products incorporate a diversity of mechanical, fluid, vacuum and automation subsystems working together to enable high speed wafer processing equipment.

The Process Engineer in the Advanced Technology group will have the responsibility to drive the development of processes and equipment for electroplating and chemistry control. As a senior process engineer you will be responsible to coordinate research and simulation-based process development with equipment designers and chemistry vendors and customers. Your expertise and work will help guide the equipment engineering team to develop critical new functionality to deliver leading edge performance.

You will use your thorough understanding of the electrochemical processes, including cleaning and drying processes, and your experimental skills to improve ASMPT-NEXX products.

• Be a company expert on electrode position, including additive behavior, rotating disc electrode measurements, electric field uniformity and fluid agitation dependencies.
• Actively use scientific literature to understand and apply research-based data to process and equipment development engineering.
• Multi-physics modeling of electric and fluid fields in electrochemical process modules
• Experimentally define process operating points for electroplating processes.
• Determine operating window, uniformity, chemical lifetime. Confirm performance against underlying theoretical models.
• Work with customers to translate the yield implications of new requirements and possible failure modes into requirements for the development of improved equipment.
• Propose improvements to equipment, and create novel process modules, and work with mechanical and electrical engineers to implement improvements.
• Work with chemical vendors to translate their chemical product operating requirements into NEXX equipment operating capabilities; discover ways to make the chemistry work better, last longer, and have a greener footprint.
• Troubleshoot and problem solve process issues raised by customers or internal testing by using best in class tools such as Model Based Problem Solving (MBPS).
• Perform process experimentation on NEXX tools or sub-systems as required to demonstrate system performance, improve yield and increase system reliability.
• Use design of experiment methodology and statistical analysis.
• Perform miscellaneous chemical laboratory testing as required.

• PhD in Chemical engineering, Chemistry, or Materials Science preferred.
• 8 or more years’ experience with process engineering in semiconductor manufacturing.