Facilities Tool, Gas & Exhaust Senior Engineer

About our group

We are seeking a highly motivated Senior Facilities Engineer to support the operation, reliability, expansion, and compliance of critical facility systems within our semiconductor wafer fabrication facility. This position will serve as the technical owner for toxic gas distribution, hazardous exhaust, gas monitoring, and abatement systems that support semiconductor manufacturing equipment.

The Senior Facilities Engineer will lead facility engineering efforts for new tool installations, capacity expansion projects, utility infrastructure upgrades, and system reliability improvements. The role will work closely with Manufacturing, Process Engineering, Equipment Engineering, EHS, and Facilities Operations to ensure safe, reliable, and uninterrupted support of fab operations.

A key responsibility of this role is maintaining accurate utility maps, P&IDs, CAD drawings, and as‑built documentation while ensuring all facility systems meet applicable SEMI, NFPA, OSHA, environmental, and local regulatory requirements.

• Review tool utility requirements and coordinate facility modifications necessary to support installation.
• Develop scope, schedules, and execution plans for exhaust modifications, gas tie‑ins, and infrastructure upgrades.
• Coordinate activities with Equipment Engineering, Facilities Operations, External Contractors, and Tool Vendors.
• Verify utility systems are fully qualified and capable of supporting production requirements prior to tool release.
• Evaluate and manage the energy impact of new tool installations, including utility capacity planning, consumption analysis and implementation of conservation measures to optimize fab operational efficiency and support sustainability objectives.

• Serve as the engineering owner for assigned facility systems supporting wafer fabrication operations.
• Provide technical leadership for toxic gas distribution systems, gas cabinets, valve manifold boxes (VMBs), specialty gas delivery systems, and associated infrastructure.
• Develop utility capacity models and long‑range infrastructure plans to support fab growth and technology roadmaps.
• Monitor system performance and identify opportunities to improve reliability, efficiency, and operational excellence.

• Support and maintain toxic gas monitoring systems and associated alarm, interlock, and emergency response functions.
• Ensure proper integration of gas detection systems with facility controls and manufacturing safety systems.
• Review and evaluate toxic gas risk mitigation measures, including ventilation, containment, leak detection, and emergency shutdown systems.
• Participate in Process Hazard Analyses (PHA), risk assessments, and Management of Change (MOC) activities.
• Support incident investigations and implementation of corrective and preventive actions.

• Maintain and update facility utility maps, P&IDs, one‑line diagrams, system schematics, and CAD drawings.
• Ensure all facility modifications are accurately reflected in as‑built documentation.
• Manage engineering change documentation through established Management of Change (MOC) processes.
• Develop and maintain system standards, design guidelines, and engineering specifications.
• Support audits, inspections, and regulatory reviews through accurate documentation and records management.

• Analyze system performance trends and drive reliability improvement initiatives.
• Lead root‑cause investigations for utility interruptions, equipment failures, and safety incidents.
• Develop preventive maintenance, predictive maintenance, and lifecycle replacement strategies for critical infrastructure.
• Support energy reduction and sustainability initiatives while maintaining manufacturing requirements.

• Demonstrated experience with toxic gas distribution systems, hazardous exhaust systems, and gas monitoring infrastructure.
• Experience supporting process equipment installations and utility coordination.
• Strong understanding of semiconductor fab utility systems and…