RIE Engineer

Company Description

By working at Harvard University, you join a vibrant community that advances Harvard's world-changing mission in meaningful ways, inspires innovation and collaboration, and builds skills and expertise. We are dedicated to creating a diverse and welcoming environment where everyone can thrive.

The Faculty of Arts and Sciences (FAS) is the historic heart of Harvard University. It is the home of Harvard’s undergraduate program (Harvard College, founded in 1636) as well as all of Harvard’s Ph.D. programs (the Harvard Kenneth

C. Griffin Graduate School of Arts and Sciences, founded in 1872), Harvard Athletics and the Division of Continuing Education. The 40 academic departments and 30+ centers of the FAS support a community unparalleled in its academic excellence across the broadest range of liberal arts and sciences disciplines. Together, the FAS seeks to foster an environment of ambition, curiosity and shared commitment to knowledge and truth that elicits excellence from all members of our community and prepares the next generation of leaders through a transformative educational experience.

Independently provide professional engineering expertise in a core facility in process design, training, quality assurance, and developmental activities.

The CNS‑nanofabrication facility (cleanroom) is the busiest lab in the field, and is supporting more than 1000 users (in FY2025) from > 300 internal and external research and industry groups. The dry etching (RIE) and film depositions (CVD and PVD) are the most critical processes in the nanofabrication and include more than 40 complex equipment, plus ancillary facilities and support more that 70‑80% of users.

The RIE Equipment Engineer is responsible for the equipment from RIE to other CVD areas and is the primary owner of more than 20 complex and heavily used tools, covering ICP‑RIEs, PECVDs, sputtering deposition systems, and scrubbers.

This position assists with the evaluation and installation of new and advanced nanofabrication tools and related processes. Investigate and innovate new hardware configurations and functions of tools to meet the new process requirements for advanced research. Assist researchers, faculty, and students regarding experimental design and use of equipment, instruments, systems, and facilities.

Manages all cleanroom gases (more than 15 toxic and non‑toxic gases) activities and related facilities/tools for nanofabrication, including gas inventory of ordering and maintaining, daily gas supply and safety monitoring, gas cylinders and cabinets maintenance, toxic and nontoxic gas cylinder replacement, and new process gas investigation for new research applications.

Manages and maintains spare parts inventory and critical components for more than 50 nanofabrication process tools (dry etching, CVDs, PVDs), including pumps, chambers, RF generators, controllers, chillers, scrubbers, compressors, and other hardware.

Collaborates with staff and assists with the development of processes.

Trains users on best safety practices and assists in monitoring laboratory safety compliance. ERT team member, especially the key responder for toxic gas‑related safety monitoring and handling.

• May be required to work in a cleanroom, chemical, or measurement laboratory environment
• May be exposed to toxic, radioactive, or carcinogenic materials, including compressed gases, acids, solvents, vacuum pump oils, and other chemicals
• May be required to work nights and weekends
• Mostly in the cleanroom, outside labs, and facility rooms. Office for interfacing users and vendor meetings, as well as paperwork.

• Lifting (up to approximately 50 pounds), bending, and other physical exertion
• Standing and/or sitting for extended periods
• Pushing, pulling, lifting, repetitive motion

• Bachelor’s degree in an engineering or related field and a minimum of three years’ relevant work experience; or
• A minimum of seven years of relevant work experience or equivalent combination of education and…