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Sr. Mechanical Engineering Manager — Vacuum Systems

Job in Milpitas, Santa Clara County, California, 95035, USA
Listing for: KLA
Full Time position
Listed on 2026-08-05
Job specializations:
  • Engineering
    Mechanical Engineer
Job Description & How to Apply Below

Senior Mechanical Engineering Manager

The Advanced Technology of RAPID Division is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next-generation EUV light source in the cutting-edge reticle inspection products. This role leads a multidisciplinary mechanical team delivering precision hardware operating in extreme environments including high vacuum, high-power laser, thermal transients, precision opto-mechanics, and precision motion mechanisms.

Responsibilities
  • Lead and develop a high-performing mechanical engineering team; set technical direction, priorities, and execution plans to deliver on schedule, cost, and quality.
  • Own mechanical system architecture and delivery for EUV source subsystems including: vacuum chambers and ultra-clean/UHV-compatible hardware; laser/mechanical integration and beam delivery mechanical packaging; collector mirror mounting/alignment mechanisms; plasma target delivery hardware; precision motion components; gas delivery mechanical interfaces; thermal management and structural dynamics.
  • Drive rigorous design review and release discipline, including requirements definition, tolerance analysis, validation/qualification planning, and documentation quality.
  • Partner closely with Technology, Optics, Systems, Production Development, Machine Controls, Manufacturing and Service organizations to improve cost, performance, manufacturability, reliability, and serviceability.
  • Lead root-cause analysis and corrective actions for complex subsystem issues; implement design improvements that increase availability and uptime.
  • Manage supplier technical engagement for precision parts and subassemblies, including vendor selection, qualification, and issue resolution.
  • Embed safety-by-design into mechanical solutions and enable people/machine safety service/production tooling (jigs, fixtures, alignment tools, handling/lifting concepts).
  • Occasional domestic/international travels may be required to support build/validation and customer-site readiness.
Preferred Qualifications
  • Experience with EUV-adjacent source or illumination subsystems, high-power laser-integrated hardware, or precision opto-mechanical alignment systems.
  • Experience with cryogenic mechanisms and vacuum feedthroughs/seals designed for reliability and maintainability.
  • Track record of production transfer and sustaining engineering support (tooling, procedures, and field escalation readiness).
Minimum Qualifications
  • B.S. in Mechanical Engineering (M.S. preferred) or equivalent related discipline.
  • 10+ years of experience developing complex hardware/capital equipment (semiconductor tools, precision vacuum systems, opto-mechanical equipment, aerospace-grade mechanisms, or similar).
  • 5+ years of people management experience leading engineers through concept-to-release development.
  • Demonstrated expertise in multiple of: vacuum/UHV design, precision mechanisms, rotating machinery/air bearings, thermal-structural design, vibration/dynamics, contamination-aware mechanical design, and design-for-manufacturability/serviceability.
  • Strong cross-functional communication and leadership skills; ability to drive alignment across technical stakeholders and suppliers.
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