Field Service Engineer

Field Service Engineer I – Plasma Technology

Location: Concord, MA, US;
Remote North America (Bay Area);
Must reside within reasonable travel time of a major airport.

The Role: Represent Oxford Instruments by delivering world‑class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., Plasma Pro, FlexAL, Estrelas etcher). The role demands a hands‑on problem‑solver with strong technical acumen, clear communication skills and a proactive mindset. You will collaborate across teams, raise issues when needed, maintain detailed documentation, and drive customer satisfaction through extensive travel to customer sites.

• System Installation & Commissioning – Lead installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD) ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
• Prevention & Corrective Maintenance – Execute scheduled and emergency maintenance with precision, diagnosing root causes and validating repairs against vacuum tolerances, leak‑up rates, and process benchmarks.
• Customer Engagement & Technical Training – Build trust and long‑term relationships through responsive communication and hands‑on training, empowering customers to operate and maintain systems.
• Advanced Troubleshooting – Resolve complex hardware and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters), providing remote support to minimize downtime.
• Calibration & System Upgrades – Calibrate critical components (AMUs, RF generators, APCs, MFCs) and implement performance‑enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

• Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or related technical field.
• 3–5 years of field service experience in the semiconductor industry, focused on plasma etch and deposition systems.
• Familiarity with cleanroom operations and safety protocols.
• Hands‑on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
• Skilled in troubleshooting 208 V electrical systems and 24 V control subsystems.
• Proficient with diagnostic instruments: vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters.
• Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.
• Knowledge of RF theory and inductively coupled plasma (ICP) systems; familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.
• Valid driver’s license with safe driving record, valid passport, ability to travel independently.
• Physically agile, comfortable working in confined spaces, capable of lifting up to 50 lb, and able to commit to extensive weekday travel Monday‑through‑Friday.

• Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components; knowledge of calibration and optimization of APCs and MFCs.
• Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.
• Proactive problem‑solving and openness to continuous learning.
• Effective communicator with strong listening skills.
• Adaptable to evolving technologies and customer needs; comfortable working independently or as part of a team.
• Commitment to service excellence, anticipating customer needs, delivering timely, high‑quality solutions, and continuous improvement.

In accordance with Massachusetts law, the expected salary for this full‑time, benefited position is between $52.88/hr and $60.096/hr compensation will be based on relevant skills, experience, and other permissible factors.