Senior Process Engineer Metrology

ASML Wilton is seeking a Senior Process Engineer to join the Wilton Factory Optics team with primary ownership of interferometric metrology processes. This role is responsible for process development, stabilization, and daily performance across interferometric metrology operations. The position requires a deep technical understanding of optical fabrication, strong analytical capability, and the ability to drive sustainable improvements in a fast-paced production environment.

The engineer will directly support output, yield, and quality targets-including improving First Pass Yield (FPY) through stable, predictable, and well controlled process behavior.

This role requires a proactive engineering mindset: anticipating issues before they impact production, driving structured 6P readiness, performing thorough RCA, and continuously evaluating new technologies to strengthen long-term process control. This is not a reactive support role; the expectation is ownership, foresight, and continuous improvement.

The Senior Process Engineer will operate as a technical leader within Wilton Factory Optics with end-to-end ownership of interferometric metrology processes. Responsibilities include defining and optimizing process parameters, ensuring measurement stability, selecting tooling, and understanding machine behavior. The engineer will manage metrology performance, environmental control strategies, and measurement output quality while ensuring consistent behavior across tools and shifts.

The metrology scope includes control of tooling, environment, fixturing, and other factors influencing surface figure and metrology output. The PE will lead the introduction and qualification of new fixtures, tools, software, and machine upgrades, and will convert interferometry, profilometry, and surface inspection data into actionable decisions.

A key responsibility is establishing strong process control: defining process windows, capability targets, and long-term monitoring systems. The PE will use JMP or Minitab to identify variation, drift, and chronic stability risks, ensuring processes are robust, documented, and repeatable using SPC analysis tools. This includes maintaining process specifications, work instructions, and standard work while driving alignment across production and support teams.

The engineer will collaborate daily with production technicians, supervisors, grinding and polishing teams, quality, equipment engineering, and maintenance, balancing immediate production needs with structured long-term improvement projects.

• Build process stability that prevents rework and FPY loss
• Detect and eliminate sources of variation impacting FPY and yield
• Lead structured RCA using statistical and analytical methods
• Ensure corrective actions are verified, embedded, and sustainable
• Own full 6P readiness for process, material, or equipment changes

Beyond daily support, the engineer is expected to proactively seek, evaluate, and integrate:

• Metrology process control methods
• Advanced metrology tools
• Next generation measurement technologies
• Equipment or software capabilities that improve stability, predictability, and throughput

• BS, MS, or PhD in Mechanical, Optical, Materials, or related engineering field
• Minimum 5 years of experience in optical fabrication and interferometric metrology
• Experience in tooling mechanics, metrology interpretation, and process development
• Demonstrated ability in structured problem solving, data analysis, RCA, and process improvement

• Strong understanding of interferometric metrology and tooling mechanics for accurate measurements
• Proficiency with interferometry, profilometry, and surface inspection tools
• Experience using JMP, Minitab, or equivalent statistical software
• Strong communication, cross functional collaboration, and leadership in a production environment
• Ability to manage multiple priorities under time sensitive conditions
• Demonstrated capability in 6P readiness, structured RCA, and verification driven corrective action

Work includes time spent on the fabrication floor, interaction with metrology equipment, and periods…